JPH0177807U - - Google Patents
Info
- Publication number
- JPH0177807U JPH0177807U JP1987170670U JP17067087U JPH0177807U JP H0177807 U JPH0177807 U JP H0177807U JP 1987170670 U JP1987170670 U JP 1987170670U JP 17067087 U JP17067087 U JP 17067087U JP H0177807 U JPH0177807 U JP H0177807U
- Authority
- JP
- Japan
- Prior art keywords
- gas recovery
- pipe
- coolant
- recovery chamber
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011084 recovery Methods 0.000 claims description 8
- 239000000110 cooling liquid Substances 0.000 claims description 2
- 239000002826 coolant Substances 0.000 claims 7
- 238000004140 cleaning Methods 0.000 claims 4
- 239000003960 organic solvent Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 230000001154 acute effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17067087U JPH0141450Y2 (en]) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17067087U JPH0141450Y2 (en]) | 1987-11-10 | 1987-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0177807U true JPH0177807U (en]) | 1989-05-25 |
| JPH0141450Y2 JPH0141450Y2 (en]) | 1989-12-07 |
Family
ID=31461815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17067087U Expired JPH0141450Y2 (en]) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0141450Y2 (en]) |
-
1987
- 1987-11-10 JP JP17067087U patent/JPH0141450Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0141450Y2 (en]) | 1989-12-07 |
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